Porr & Wörgötter * Real-time Quantitative Stereo- and/or Motion-Analysis of Video Image Sequences

ZEISS-Example

The following page shows examples of 3D-Stereo-Microscopic Images obtained with a novel ZEISS microscope. The page shows the 3-D Depth Map of a silicon wafer (mag. 100 fold).

The original microscope images contain several problems (shadows, reflections, etc.) which affect the quality of the initial disparity analysis. This section, therefore, particularly well demonstrates how post-processing improves an initially low-quality analysis result. The finally obtained excellent disparity map (bottom) is obtained from a averaging of 100 focal planes taken from the microscope (steps between frames were 0.1 micrometer for the wafer and 1.0 micrometer for the solder connection).

Problems:
1) Original frames are not everywhere in focus.

2) The individual disparity maps are unusable.

The figures below show the final color coded disparity map and the reconstructed left and right stereo-images from the wafer.
Rotated view
Figure 7
Click on image to magnify or
here to get an more enhanced view
Average disparity map
Figure 8
Click on image to magnify
Reconstructed left image
Figure 9
Click on image to magnify
Reconstructed right image
Figure 10
Click on image to magnify
Result:
1) The average disparity map accurately depicts the depth structure of the wafer.

2) The reconstructed images are everywhere in focus and these are true stereo-images which can be fused to get a 3-D impression.